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PhD position on MEMS-CMOS Integration

Vacancy details

General information


The faculty of Electrical Engineering, Mathematics and Computer Science (EEMCS) uses mathematics, electronics and computer technology to contribute to the development of Information and Communication Technology (ICT). With ICT present in almost every device and product we use nowadays, we embrace our role as contributors to a broad range of societal activities and as pioneers of tomorrow's digital society. As part of a people-first tech university that aims to shape society, individuals and connections, our faculty works together intensively with industrial partners and researchers in the Netherlands and abroad, and conducts extensive research for external commissioning parties and funders. Our research has a high profile both in the Netherlands and internationally. It has been accommodated in three multidisciplinary UT research institutes: Mesa+ Institute, TechMed Centre and Digital Society Institute.

As an employer, the EEMCS Faculty offers jobs that matter. We equip you as a staff member to shape new opportunities both for yourself and for our society. With our Faculty, you will be part of a leading tech university that is changing our world for the better. We offer an open, inclusive and entrepreneurial climate, in which we encourage you to make healthy choices, for example, with our flexible, customizable conditions.   



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Position description


Academic staff - PhD

Job title

PhD position on MEMS-CMOS Integration

Minimum salary


Maximum salary


Job description

Thanks to microfabrication technologies, it is possible to realize many sensing structures in a small volume. A novel approach would be to integrate sensing structures with unique sensitivities towards different physical quantities (e.g. acceleration or temperature). By data processing, the desirable signals can be derived from the combination of these sensor inputs. This requires a lot of (complex) data processing and is ideally performed as close to the sensing structures as possible. This novel approach for sensing has the potential to improve both performance and functionality of sensors for medical and other societal applications.

The research aims on the design, fabrication and characterization of a fully integrated sensor system like this. The challenge is therefore to (1) design a set of different sensing structures, (2) design a MEMS fabrication process that is compatible with CMOS, (3) fabrication of the MEMS structures in the MESA+ cleanroom and (4) measure the performance and synergy of the device. The investigations involve bulk and surface micromachining using e.g. DRIE (Deep Reactive Ion Etching) and CVD (Chemical Vapor Deposition).

The PhD candidate will work at the Integrated Devices and Systems (IDS) group within the Faculty of Electrical Engineering, Mathematics and Computer Science (EEMCS) at the University of Twente in Enschede, the Netherlands. You will carry out the research at the University of Twente, with guidance from senior scientists and support from a senior engineer. Various teaching activities in your field of expertise may take up to 20% of your time.


  • You are highly motivated and an enthusiastic researcher.
  • You have a MSc degree in electrical engineering, nanotechnology, applied physics, mechanical engineering or a related topic, with excellent theoretical and experimental skills.
  • You have shown affinity with microfabrication, electronics, MEMS or sensors.
  • You have good team spirit and like to work in an internationally oriented environment.
  • You are fluent in English.

We offer

You will be appointed on a fulltime position for four years, with a qualifier in the first year, within a very stimulating scientific environment. The university offers a dynamic ecosystem with enthusiastic colleagues. Salary and conditions are in accordance with the collective labour agreement for Dutch universities (CAO- NU).

  • Salary ranging from € 2.395 gross at the start to € 3.061 gross in the fourth year;
  • Excellent benefits including a holiday allowance of 8% of the gross annual salary and a year-end bonus of 8.3% and a solid pension scheme;
  • A training program in which you and your supervisor will make up a plan for additional suitable education and supervision;
  • We encourage a high degree of responsibility and independence, while collaborating with close colleagues, researchers and other university staff.

Information and application

Send your application before 7th of February, 2021, and include:

  • An application/motivation letter, emphasizing your specific interest and motivation to apply for this position,
  • A detailed CV (resume), a publication list, and an academic transcript of your BSc and MSc education.

An interview will be part of the selection procedure.

For more information about the position, please contact the IDS group secretary Mrs. Marthe Kampman at


About the department

The IDS group belongs to the Faculty of Electrical Engineering, Mathematics, and Computer Science. The research group studies electronic and electromechanical components and develops new concepts for nanoscale materials, devices and systems using nano- and microfabrication techniques. One ambition of the IDS group is to combine its experience in both semiconductor and MEMS technologies to design, fabricate and characterize novel smart sensing devices.

IDS contributes to the MESA+ Institute and has a strong track records in knowledge transfers to the semiconductor industry. MESA+ is the largest research institute of the University of Twente. The institute trains graduate students and PhD-students and conducts research in the fields of nanotechnology, microsystems, materials science and microelectronics. Unique of MESA+ is its multidisciplinary composition.

Position localisation

Job location

Nederland, Enschede, Drienerlolaan 5, 7522 NB


Drienerlolaan 5 7522 NB Enschede

Candidate criteria

Minimum level of education required

4. Master

Scientific area